Image sensor and method for manufacturing the same

ABSTRACT

An image sensor includes a color filter, an over-coating layer formed on the color filter, and a medium layer formed on the over-coating layer, wherein the medium layer is configured with at least two medium layers of which refractive indices are different from each other.

FIELD OF THE INVENTION

The present invention relates to a semiconductor manufacturingtechnology; and, more particularly, to a complementary metal-oxidesemiconductor (CMOS) image sensor and a method of manufacturing thesame.

DESCRIPTION OF RELATED ART

In recent years, a demand for a digital camera shows a tendency toexplosively increase with the development of visual communicationtechnology using an Internet. In addition, with an increasing supply ofa mobile communication terminal such as a personal digital assistant(PDA), an international mobile telecommunications-2000 (IMT-2000), acode division multiple access (CDMA) terminal or the like, in which acamera is mounted, a demand for a miniature camera module increaseaccordingly.

As a camera module, an image sensor module using a charge coupled device(CCD) or a complementary metal-oxide semiconductor (CMOS) image sensor,which is a basic constitution component, is widely spread and utilized.In the image sensor, a color filter is aligned over a light-sensingelement for embodying color images, wherein the light-sensing elementreceives light from an exterior so as to generate photocharges andaccumulates them. Such a color filter array CFA is configured with threecolors such as red (R), green (G) and blue (B), or yellow, magenta andcyan.

In general, the image sensor is configured with a light-sensing elementfor sensing light and a logic circuit component for processing thesensed light into an electrical signal, which is, in turn, systemizedinto data. There has been numerously attempted to improve a fill factor,which represents an area ratio of the light-sensing element with respectto the overall image sensor. However, these attempts are limited sincethe logic circuit component cannot be basically removed. Therefore,there introduced a light condensing technology for changing paths ofincident lights that enter to areas other than the light-sensing elementand condensing the incident lights into the light-sensing element so asto enhance photosensitivity. To realize the light condensing technology,a method for forming a microlens on the color filter of the image sensoris particularly used.

FIG. 1 is a cross-sectional view illustrating a conventional imagesensor having a color filter and a microlens.

Referring to FIG. 1, the conventional image sensor includes a pluralityof photodiodes PD, a plurality of color filters CF, an over-coatinglayer OCL, a plurality of microlenses ML, and a low temperature oxide(LTO) layer. Herein, the plurality of photodiodes PD formed in asubstrate SUB receive lights. The plurality of color filters CF areformed on the photodiodes PD such that they one-to-one corresponds tothe respective color filters CF. The over-coating layer OCL is formed onthe color filters CF for removing a step caused by a height differencebetween the color filters CF. The plurality of microlenses ML are formedon the respective color filters CF in the shape of a dome. The lowtemperature is formed on the over-coating layer OCL such that it coversthe microlens ML.

The microlens ML, as described above, is formed on the color filter CFfor increasing the sensitivity of the image sensor by condensing thelights onto the photodiode PD. The microlens ML acts as an importantcomponent, which plays a role in determining the sensitivity of theimage sensor. Typically, it is reported that the sensitivity increasescorrespondingly as the size increases.

However, in the conventional image sensor, there often occurs asensitivity difference between a central portion A and an edge portion Bof the unit pixel, as illustrated in FIGS. 2A and 2B. Actually, in1.3-mega pixel array, there is a great difference in sensitivity betweenthe central and edge portions A and B. That is, the sensitivity of thecentral portion A is 1,200 mV/lux-sec, whereas the sensitivity of theedge portion B is 750 mV/lux-sec in case of a green pixel. The reason isthat incident angles of the lights incident onto the central and edgeportions A and B of the pixel array are different from each other, butthey are formed of the same layer. Accordingly, as illustrated in FIG.2B, an actual image appears to be darker in the edge portion B than thecentral portion A.

SUMMARY OF THE INVENTION

It is, therefore, an object of the present invention to provide an imagesensor capable of increasing sensitivity at an edge portion of a pixelarray.

It is another object of the present invention to provide an image sensorcapable of resolving a complexity of manufacturing process owing to aprocess of forming a microlens for condensing an incident light.

It is yet another object of the present invention to provide a methodfor manufacturing the image sensor.

In accordance with an aspect of the present invention, there is providedan image sensor including: a color filter; an over-coating layer formedon the color filter; and a medium layer formed on the over-coatinglayer, wherein the medium layer is configured with at least two mediumlayers of which refractive indices are different from each other.

In accordance with another aspect of the present invention, there isprovided an image sensor including: color filters formed on a firstregion and a second region, respectively, wherein an incident angle of alight to the second region is greater than that of a light to the firstregion; an over-coating layer formed on the color filters; microlensesformed on the over-coating layer such that they are correspondent to thecolor filters, respectively; a medium layer covering the microlens inthe second region, wherein the medium layer has a refractive indexhigher than that of air; and a capping layer covering a resultantstructure including the medium layer.

In accordance with still another aspect of the present invention, thereis provided an image sensor including: color filters formed on a firstregion and a second region, respectively, wherein an incident angle of alight to the second region is greater than that of a light to the firstregion; an over-coating layer formed on the color filters; microlensesformed on the over-coating layer such that they are correspondent to thecolor filters, respectively; a first medium layer covering the microlensin the second region, wherein the first medium layer has a refractiveindex higher than that of air; a second medium layer covering aresultant structure including the first medium layer, wherein the secondmedium layer has a refractive index lower than that of the first mediumlayer; and a capping layer formed on the second medium layer.

In accordance with further aspect of the present invention, there isprovided an image sensor including: color filters; an over-coating layerformed on the color filters; microlenses formed on the over-coatinglayer such that they are correspondent to the color filters,respectively; and a medium layer formed on the over-coating layer,wherein the medium layer is configured with at least two medium layersof which refractive indices are different from each other.

In accordance with yet further aspect of the present invention, there isprovided a method for manufacturing an image sensor, including: formingcolor filters on a first region and a second region, respectively,wherein an incident angle of a light to the second region is greaterthan that of a light to the first region; forming an over-coating layeron the color filters; forming microlenses on the over-coating layer suchthat they are correspondent to the color filters, respectively; forminga first medium layer covering the microlens, wherein the first mediumlayer has a refractive index higher than that of air; removing the firstmedium layer formed in the first region so that the first medium layerremains only in the second region; forming a second medium layer suchthat it covers a resultant structure including the first medium layer,wherein the second medium layer has a refractive index lower than thatof the first medium layer; and forming a capping layer on the secondmedium layer.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects and features of the present invention willbecome better understood with respect to the following description ofthe preferred embodiments given in conjunction with the accompanyingdrawings, in which:

FIG. 1 is a cross sectional view of a conventional complementarymetal-oxide semiconductor (CMOS) image sensor;

FIGS. 2A and 2B are schematic views setting forth a problem of theconventional CMOS image sensor;

FIG. 3 is a schematic view explaining Snell's law;

FIG. 4 is a cross sectional view illustrating an image sensor inaccordance with a first embodiment of the present invention;

FIG. 5 is an enlarge sectional view explaining a principle of a lightrefraction of the image sensor of FIG. 4;

FIGS. 6 and 7 are cross sectional views illustrating an image sensor inaccordance with a second embodiment of the present invention;

FIG. 8 is a SEM (scanning electron microscope) micrograph of the imagesensor shown in FIG. 6;

FIG. 9 is a diagram illustrating a characteristic of the image sensorhaving the structure of FIG. 8;

FIGS. 10A, 10B and 10C are cross sectional views illustrating a methodfor manufacturing the image sensor of FIG. 6;

FIG. 11 is a cross sectional view illustrating an image sensor accordingto a third embodiment of the present invention; and

FIGS. 12A and 12B are schematic views explaining a principle of a lightrefraction in the image sensor shown of FIG. 11.

DETAILED DESCRIPTION OF THE INVENTION

An image sensor and a method for manufacturing the same in accordancewith exemplary embodiments of the present invention will be described indetail with reference to the accompanying drawings.

The image sensor of the present invention increases sensitivity at edgeportions of a pixel array using a principle of light refraction based onSnell's law. Thereinafter, Snell's law will be illustrated withreference to FIG. 3.

Referring to FIG. 3, an incident ray, a refractive ray and a normal lineperpendicular to a boundary between two media exist in the same planeaccording to Snell's law. In addition, a ratio of sine of an incidentangle θi with respect to sine of a refractive angle θr is constant,which is equal to a ratio of light velocity in one medium with respectto light velocity in another medium, and a reciprocal of a ratio ofrefractive index of one medium with respect to refractive index ofanother medium. That is, Snell's law can be briefly summarized as below.

$\begin{matrix}{\frac{{Sin}\; \theta \; i}{{Sin}\; \theta \; r} = {\frac{n\; 2}{n\; 1} = {\frac{v\; 1}{v\; 2} = {n\; 12}}}} & \left\lbrack {{Eq}.\mspace{14mu} 1} \right\rbrack\end{matrix}$

where θi is greater than θr if n2>n1.

That is, if the light changes a pathway from the medium with lowrefractive index to the medium with high refractive index when the lightpropagates, the refractive angle is smaller than the incident angle.

On the basis of Snell's law, the inventive image sensor will be morefully illustrated with accompanying drawings. The present invention may,however, be embodied in different forms and should not be constructed aslimited to the embodiments set forth herein. Rather, these embodimentsare provided so that this disclosure will be thorough and complete, andwill fully convey the scope of the present invention to those skilled inthe art. Like reference numerals in the drawings denote like elements.

Embodiment 1

FIG. 4 is a cross sectional view illustrating an image sensor inaccordance with a first embodiment of the present invention.

Referring to FIG. 4, in the image sensor in accordance with the firstembodiment the present invention, a medium layer 10 includes at leasttwo medium layers having different refractive indices. Herein, for thesake of illustrative convenience, the medium layer 10 is configured withthree medium layers, for example.

Specifically, the image sensor in accordance with the first embodimentof the present invention includes a plurality of photodiodes PD, aplurality of transistors (not shown), a plurality of interlayerinsulating layers (not shown), a metal interconnection (not shown), afirst over-coating layer OCL1, a color filter CF, a second over-coatinglayer OCL2, and a medium layer 10. Herein, the plurality of photodiodesPD are formed in a substrate SUB for receiving an incident light. Theplurality of transistors, which are disposed on the substrate SUB,transfer charges accumulated at the photodiode PD. The plurality ofinterlayer insulating layers are formed such that they cover theplurality of transistors. The metal interconnection is interposedbetween the interlayer insulating layers. The first over-coating layerOCL1 is formed for removing a step due to the metal interconnection. Thecolor filters CF are formed on top of the first over-coating layer OCL1such that they one-to-one correspond to the respective photodiodes PD.The second over-coating layers OCL2, which is disposed on top of thecolor filters CF, is formed for removing a step due to the color filterCF. The medium layer 10 is formed on top of the second over-coatinglayer OCL2.

The medium layer 10 is configured with three medium layers of whichrefractive indices are different from one another, wherein the number ofthe medium layers may be equal to three or less, or three or more. Themedium layer 10 may be formed such that a medium having a higherrefractive index is formed in a direction that the second over-coatinglayer OCL2 is formed, i.e., in a direction of the photodiode PD. Thatis, it is preferred that the medium layers are sequentially disposed onthe second over-coating layer OCL2 in a decreasing order of refractiveindex, i.e., n1<n2<n3. In addition, the uppermost medium layer n1 of themedium layer 10, i.e. the medium layer in contact with air, may have arefractive index higher than that of air. For example, since therefractive index of air is 1, it is preferable that the uppermost mediumlayer has the refractive index greater than 1.

The uppermost medium layer n1 of the medium layer 10 acts as a cappinglayer for a chip, and is formed of a medium having a refractive indexgreater than that of air (n=1.0029). For example, the medium may be asilicon oxide material having a refractive index in range ofapproximately 1.4 to approximately 1.45. A middle medium layer n2 may beomitted in consideration of a total thickness of a chip. In this case,the medium layer 10 may be configured with only two medium layers.Herein, the refractive index of the middle medium layer n2 should behigher than that of the uppermost medium layer n1, but lower than thatof the lowermost medium layer n3. For example, the middle layer n2 isformed of a boron phosphorus silicate glass (BPSG) or an undopedsilicate glass (USG), of which refractive index is 1.5. Preferably, thelowermost layer n3 is formed of a medium which has the highestrefractive index and can minimize a reflection angle of a light.

Hereafter, advantageous effect of the image sensor in accordance withthe present invention will be illustrated with reference to FIG. 5.

As shown in FIG. 5, a relation of incident angles with respect to thethree medium layers are θ1>θ2>θ3>θ4 at a side area, i.e. at an edgeportion B, but θ1=θ2=θ3=θ4=0° at a central portion A. Therefore, thesensitivity at the edge portion B of the pixel array can be improved incomparison with the prior art.

The image sensor in accordance with the first embodiment of the presentinvention as illustrated above does not employ a microlens but uses themedium layer in which several media are stacked. Accordingly, itpossible to omit the process of forming the microlens, which isrelatively difficult process for control, and thus simplify themanufacturing process.

Embodiment 2

FIGS. 6 and 7 are cross sectional views illustrating an image sensor inaccordance with a second embodiment of the present invention.

Referring to FIGS. 6 and 7, in an image sensor in accordance with thesecond embodiment of the present invention, a medium layer having atleast one medium layer is formed on a microlens ML. Here, if the numberof medium layer is two or more, respective medium layers have differentrefractive indices.

In detail, the image sensor in accordance with the second embodiment ofthe present invention includes a color filter CF, an over-coating layerOCL, microlenses ML, a medium layer 20, and a low temperature oxidelayer LTO. Herein, the color filters CF are formed on top of theover-coating layer OCL such that they one-to-one correspond torespective photodiodes PD. The over-coating layer OCL, which is disposedon top of the color filter CF, is formed for removing a step due to thecolor filter CF. The microlenses ML are formed on top of theover-coating layer OCL such that they one-to-one Correspond to the colorfilters CF, respectively. The medium layer 20 is formed such that itcovers the microlenses at edge portions B of the pixel array. The lowtemperature oxide layer LTO is formed such that it covers the resultantstructure including the medium layer 20. Herein, it is preferable thatthe medium layer 20 is formed of a medium having a refractive indexequal to 1.4 or higher. For example, it is preferable that the mediumlayer 20 is formed of spin on glass (SOG), fluorinated silicate glass(FSG) or an oxide-based material used as a device isolation layer formedthrough shallow trench isolation (STI) process such as high densityplasma (HDP) oxide and carbon doped oxide (CDO) or the like.

Meanwhile, referring to FIG. 7, there is formed a medium layer 30 inwhich two medium layers are stacked, instead of the single medium layer20 of FIG. 6. That is, as shown in FIG. 7, the medium layer 30 at theedge portion B is configured with two medium layers n1 and n2 of whichrefractive indices are different from each other, whereas the mediumlayer 30 at the central portion A is a single medium layer configuredwith only the medium layer n1. Herein, it is preferable that an uppermedium layer n1 has a refractive index lower than that of a lower mediumlayer n2. The upper medium layer n1 is formed of a material having arefractive index in range of approximately 1.4 to approximately 1.5, andthe lower medium layer n2 is formed of a material having the refractiveindex of approximately 1.5.

Meanwhile, FIG. 8 is a SEM micrograph of the image sensor in which themedium layer 20 is interposed between the microlens ML and the lowtemperature oxide layer LTO as shown in FIG. 6. FIG. 9 shows thatsensitivity and color sensitivity are improved in virtue of thestructure of FIG. 8.

Hereafter, a method for manufacturing the image sensor of FIG. 6 will beillustrated with reference to FIGS. 10A to 10C.

First, as shown in FIG. 10A, an over-coating layer OCL is formed on topof a substrate in which color filters CF are formed. Thereafter,microlenses ML are formed on the over-coating layer OCL such that theyone-to-one correspond to the respective color filters CF. Subsequently,a medium layer 20 is deposited or coated such that it covers themicrolenses ML.

Next, as shown in FIG. 10B, a photolithograph process is performed toform a photoresist pattern PR exposing the central portion A of thepixel array, and a wet etching process is then performed to remove theexposed medium layer 20. Hereby, the medium layer 20 is removed at thecentral portion A but remains at edge portions B. Afterwards, aphotoresist pattern is removed by strip process.

Thereafter, as shown in FIG. 10C, a low temperature oxide layer LTO isformed to cover over the resultant structure including the medium layer20. Meanwhile, before forming the low temperature oxide layer LTO,another medium layer having a refractive index lower than that of themedium layer 20 may be formed on the resultant structure including themedium layer 20.

Embodiment 3

FIG. 11 is a cross sectional view illustrating an image sensor inaccordance with a third embodiment of the present invention.

In FIG. 11, a medium layer may be formed by stacking low temperatureoxide layers LTO1 and LTO2 instead of the medium layer 30 of FIG. 7.Here, the low temperature oxides LTO1 and LTO2 are formed such that theyhave different refractive indices, wherein the lower low temperatureoxide layer LTO1 has a higher refractive index than the upper lowtemperature oxide layer LTO2.

Thereinafter, a principle of light refraction according to refractiveindices of the medium layers of FIG. 11 will be illustrated withreference to FIGS. 12A and 12B.

Generally, an incident angle of light entering the side portion B of thepixel array is greater than that of light entering a central portion A.By lowering the incident angle of the light entering the side portion 8,sensitivity at the side portion B of the pixel array can be improved asshown in FIGS. 12A and 12B. That is, in FIGS. 12A and 12B, the relationof the incident angles with respect to the respective media satisfies afollowing inequality condition such as θi>θr(θi′)>θr′ so that theincident angle with respect to the side portion B of the pixel arraydecreases.

The present application contains subject matter related to the Koreanpatent application No. KR 2005-0129439, filed in the Korean PatentOffice on Dec. 26, 2005, the entire contents of which being incorporatedherein by reference.

While the present invention has been described with respect to certainpreferred embodiments, it will be apparent to those skilled in the artthat various changes and modifications may be made without departingfrom the spirit and scope of the invention as defined in the followingclaims.

1-27. (canceled)
 28. A method, comprising: receiving light at both an edge portion and a central portion of an image sensor; and directing the received light through a plurality of layers of increasing refractive indices to pass the light toward a plurality of photodiodes at refractive angles that are less than incident angles at which the light was received by the edge portion and the central portion; wherein said directing the received light results in a greater change between incident angles and refractive angles for light received by the edge portion than for light received by the central portion.
 29. The method of claim 28, wherein said receiving light comprises receiving light at the edge portion at incident angles that are greater than incident angles at which light is received at the central portion.
 30. The method of claim 28, wherein said directing the received light comprises: directing light received at the edge portion through the plurality of layers; and directing light received at the central portion through less than all layers of the plurality of layers.
 31. The method of claim 28, wherein said directing the received light comprises further directing the received light through a plurality of microlenses configured to focus light on respective photodiodes of the plurality of photodiodes.
 32. The method of claim 28, wherein said directing the received light comprises further directing the received light through color filters for respective photodiodes of the plurality of photodiodes.
 33. A method, comprising: directing light received at an edge portion of the image sensor toward a plurality of first photodiodes at refractive angles that are less than incident angles at which the light was received by the edge portion; directing light received at a central portion of the image sensor toward a plurality of second photodiodes at refractive angles that are less than incident angles at which the light was received by the central portion; wherein said directing light received at the edge portion comprises generating a greater change between incident angles and refractive angles for light received by the edge portion than for light received by the central portion.
 34. The method of claim 33, further comprising receiving light at the edge portion at incident angles that are greater than incident angles at which light is received at the central portion.
 35. The method of claim 33, wherein said directing light received at an edge portion comprises directing the light received at the edge portion through a plurality of layers of increasing refractive indices.
 36. The method of claim 33, wherein: said directing light received at an edge portion comprises directing the light received at the edge portion through a plurality of layers of increasing refractive indices; and said directing light received at a central portion comprises directing light received at the central portion through a subset of the plurality of layers.
 37. The method of claim 33, wherein: said directing light received at an edge portion comprises directing the light received at the edge portion through a plurality of first microlenses configured to focus light on respective photodiodes of the plurality of first photodiodes; and said directing light received at a central portion comprises directing the light received at the central portion through a plurality of second microlenses configured to focus light on respective photodiodes of the plurality of second photodiodes.
 38. The method of claim 33, wherein: said directing light received at an edge portion comprises directing the light received at the edge portion through color filters for respective photodiodes of the plurality of first photodiodes; and said directing light received at a central portion comprises directing the light received at the central portion through color filters for respective photodiodes of the plurality of second photodiodes.
 39. The method of claim 33, wherein: said directing light received at an edge portion comprises directing the light received at the edge portion through a plurality of layers of increasing refractive indices and through a plurality of first microlenses configured to focus light on respective photodiodes of the plurality of first photodiodes; and said directing light received at a central portion comprises directing the light received at the central portion through a plurality of second microlenses configured to focus light on respective photodiodes of the plurality of second photodiodes without directing the light received at the central portion through the plurality of layers of increasing refractive indices.
 40. A method, comprising: directing light received at an edge portion of an image sensor through a plurality of layers of increasing refractive indices to pass the light received at the edge portion toward a plurality of first photodiodes; directing light received at a central portion of the image sensor through a subset of the plurality of layers of increasing refractive indices to pass the light received at the central portion toward a plurality of second photodiodes.
 41. The method of claim 40, further comprising receiving light at the edge portion at incident angles that are greater than incident angles at which light is received at the central portion.
 42. The method of claim 40, wherein: said directing light received at the edge portion comprises directing the light received at the edge portion through a plurality of first microlenses configured to focus light on respective photodiodes of the plurality of first photodiodes; and said directing light received at the central portion comprises directing the light received at the central portion through a plurality of second microlenses configured to focus light on respective photodiodes of the plurality of second photodiodes.
 43. The method of claim 40, wherein: said directing light received at the edge portion comprises directing the light received at the edge portion through color filters for respective photodiodes of the plurality of first photodiodes; and said directing light received at the central portion comprises directing the light received at the central portion through color filters for respective photodiodes of the plurality of second photodiodes. 